Oxford Instruments Plasma Technology New Manufacturing and Research Facility 2021

Oxford Instruments Plasma Technology New Manufacturing and Research Facility 2021

Cleanroom, Mechanical & Electrical, Process Systems

Background

Client: Oxford Instruments Plasma Technology (OIPT)

Relationship with Client: AED was directly appointed by OIPT, with the recommendation coming from the Cardiff University TRF project team. This demonstrated AED’s expertise in designing advanced research and manufacturing facilities for high-tech clients.

The Problem: OIPT required a state-of-the-art facility to enable the development of next-generation wafer processing solutions and to conduct continuous improvement and reliability testing for high-volume manufacturing (HVM). The facility also needed to align with strict sustainability goals, incorporating energy-saving technologies to significantly reduce environmental impact and eliminate the use of fossil fuels.

Project Summary

AED was responsible for designing the mechanical, electrical, and process systems for OIPT’s new facility, which includes:

  • 1,000m² of ISO 5 & 6 application laboratories equipped with advanced wafer processing, characterisation, and metrology technologies.
  • 800m² of research laboratories designed to accommodate future upgrades to ISO 8.
  • 2,500m² of semi-clean manufacturing space, providing flexibility for scaling manufacturing capabilities.

 

AED also led the design of the cleanroom mechanical and electrical infrastructure, including cleanroom architecture. As the design advanced through the development stages, AED integrated energy-efficient systems to help the client meet their sustainability targets. This included free cooling systems and air-cooled heat pumps, substantially lowering the original natural gas requirement for the project.

Throughout the project, AED provided site support, including inspections, witnessing installations, and addressing RFIs to ensure the facility met OIPT’s exacting standards.

Key Achievements / Outcomes

Final Outcome:
AED delivered a cutting-edge manufacturing and research facility tailored to OIPT’s needs. The design supports next-generation processes while integrating advanced sustainability features to reduce environmental impact and eliminate fossil fuel dependency.

Client Feedback:
The facility positions OIPT to advance its capabilities in wafer processing and high-volume manufacturing, aligning with the company’s future-focused vision.

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